JPS63175197U - - Google Patents

Info

Publication number
JPS63175197U
JPS63175197U JP2397587U JP2397587U JPS63175197U JP S63175197 U JPS63175197 U JP S63175197U JP 2397587 U JP2397587 U JP 2397587U JP 2397587 U JP2397587 U JP 2397587U JP S63175197 U JPS63175197 U JP S63175197U
Authority
JP
Japan
Prior art keywords
door body
stock
rear door
flow path
stock inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2397587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336557Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987023975U priority Critical patent/JPH0336557Y2/ja
Publication of JPS63175197U publication Critical patent/JPS63175197U/ja
Application granted granted Critical
Publication of JPH0336557Y2 publication Critical patent/JPH0336557Y2/ja
Expired legal-status Critical Current

Links

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  • Paper (AREA)
JP1987023975U 1987-02-19 1987-02-19 Expired JPH0336557Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987023975U JPH0336557Y2 (enrdf_load_stackoverflow) 1987-02-19 1987-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987023975U JPH0336557Y2 (enrdf_load_stackoverflow) 1987-02-19 1987-02-19

Publications (2)

Publication Number Publication Date
JPS63175197U true JPS63175197U (enrdf_load_stackoverflow) 1988-11-14
JPH0336557Y2 JPH0336557Y2 (enrdf_load_stackoverflow) 1991-08-02

Family

ID=30822780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987023975U Expired JPH0336557Y2 (enrdf_load_stackoverflow) 1987-02-19 1987-02-19

Country Status (1)

Country Link
JP (1) JPH0336557Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050918A (ja) * 1983-08-31 1985-03-22 Wakomu:Kk 半導体処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050918A (ja) * 1983-08-31 1985-03-22 Wakomu:Kk 半導体処理装置

Also Published As

Publication number Publication date
JPH0336557Y2 (enrdf_load_stackoverflow) 1991-08-02

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