JPS63175197U - - Google Patents

Info

Publication number
JPS63175197U
JPS63175197U JP2397587U JP2397587U JPS63175197U JP S63175197 U JPS63175197 U JP S63175197U JP 2397587 U JP2397587 U JP 2397587U JP 2397587 U JP2397587 U JP 2397587U JP S63175197 U JPS63175197 U JP S63175197U
Authority
JP
Japan
Prior art keywords
door body
stock
rear door
flow path
stock inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2397587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336557Y2 (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987023975U priority Critical patent/JPH0336557Y2/ja
Publication of JPS63175197U publication Critical patent/JPS63175197U/ja
Application granted granted Critical
Publication of JPH0336557Y2 publication Critical patent/JPH0336557Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Paper (AREA)
JP1987023975U 1987-02-19 1987-02-19 Expired JPH0336557Y2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987023975U JPH0336557Y2 (da) 1987-02-19 1987-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987023975U JPH0336557Y2 (da) 1987-02-19 1987-02-19

Publications (2)

Publication Number Publication Date
JPS63175197U true JPS63175197U (da) 1988-11-14
JPH0336557Y2 JPH0336557Y2 (da) 1991-08-02

Family

ID=30822780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987023975U Expired JPH0336557Y2 (da) 1987-02-19 1987-02-19

Country Status (1)

Country Link
JP (1) JPH0336557Y2 (da)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050918A (ja) * 1983-08-31 1985-03-22 Wakomu:Kk 半導体処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050918A (ja) * 1983-08-31 1985-03-22 Wakomu:Kk 半導体処理装置

Also Published As

Publication number Publication date
JPH0336557Y2 (da) 1991-08-02

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