JPS63175160U - - Google Patents

Info

Publication number
JPS63175160U
JPS63175160U JP2702087U JP2702087U JPS63175160U JP S63175160 U JPS63175160 U JP S63175160U JP 2702087 U JP2702087 U JP 2702087U JP 2702087 U JP2702087 U JP 2702087U JP S63175160 U JPS63175160 U JP S63175160U
Authority
JP
Japan
Prior art keywords
filament
ion beam
cathode section
lab
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2702087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2702087U priority Critical patent/JPS63175160U/ja
Publication of JPS63175160U publication Critical patent/JPS63175160U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP2702087U 1987-02-24 1987-02-24 Pending JPS63175160U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2702087U JPS63175160U (enrdf_load_stackoverflow) 1987-02-24 1987-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2702087U JPS63175160U (enrdf_load_stackoverflow) 1987-02-24 1987-02-24

Publications (1)

Publication Number Publication Date
JPS63175160U true JPS63175160U (enrdf_load_stackoverflow) 1988-11-14

Family

ID=30828660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2702087U Pending JPS63175160U (enrdf_load_stackoverflow) 1987-02-24 1987-02-24

Country Status (1)

Country Link
JP (1) JPS63175160U (enrdf_load_stackoverflow)

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