JPS63175154U - - Google Patents

Info

Publication number
JPS63175154U
JPS63175154U JP4442387U JP4442387U JPS63175154U JP S63175154 U JPS63175154 U JP S63175154U JP 4442387 U JP4442387 U JP 4442387U JP 4442387 U JP4442387 U JP 4442387U JP S63175154 U JPS63175154 U JP S63175154U
Authority
JP
Japan
Prior art keywords
heat insulating
reaction chamber
gas
furnace
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4442387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4442387U priority Critical patent/JPS63175154U/ja
Publication of JPS63175154U publication Critical patent/JPS63175154U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
JP4442387U 1987-03-26 1987-03-26 Pending JPS63175154U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4442387U JPS63175154U (zh) 1987-03-26 1987-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4442387U JPS63175154U (zh) 1987-03-26 1987-03-26

Publications (1)

Publication Number Publication Date
JPS63175154U true JPS63175154U (zh) 1988-11-14

Family

ID=30862219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4442387U Pending JPS63175154U (zh) 1987-03-26 1987-03-26

Country Status (1)

Country Link
JP (1) JPS63175154U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005206895A (ja) * 2004-01-23 2005-08-04 Koyo Thermo System Kk 真空浸炭炉

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005206895A (ja) * 2004-01-23 2005-08-04 Koyo Thermo System Kk 真空浸炭炉
JP4539904B2 (ja) * 2004-01-23 2010-09-08 光洋サーモシステム株式会社 真空浸炭炉

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