JPS63174435U - - Google Patents
Info
- Publication number
- JPS63174435U JPS63174435U JP15796486U JP15796486U JPS63174435U JP S63174435 U JPS63174435 U JP S63174435U JP 15796486 U JP15796486 U JP 15796486U JP 15796486 U JP15796486 U JP 15796486U JP S63174435 U JPS63174435 U JP S63174435U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- semiconductor wafer
- gas
- pedestal
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15796486U JPH0614475Y2 (ja) | 1986-10-14 | 1986-10-14 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15796486U JPH0614475Y2 (ja) | 1986-10-14 | 1986-10-14 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63174435U true JPS63174435U (zh) | 1988-11-11 |
| JPH0614475Y2 JPH0614475Y2 (ja) | 1994-04-13 |
Family
ID=31081004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15796486U Expired - Lifetime JPH0614475Y2 (ja) | 1986-10-14 | 1986-10-14 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0614475Y2 (zh) |
-
1986
- 1986-10-14 JP JP15796486U patent/JPH0614475Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0614475Y2 (ja) | 1994-04-13 |
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