JPS63173351U - - Google Patents
Info
- Publication number
- JPS63173351U JPS63173351U JP6543487U JP6543487U JPS63173351U JP S63173351 U JPS63173351 U JP S63173351U JP 6543487 U JP6543487 U JP 6543487U JP 6543487 U JP6543487 U JP 6543487U JP S63173351 U JPS63173351 U JP S63173351U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- rotating body
- chamber
- rotating
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012423 maintenance Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Centrifugal Separators (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6543487U JPS63173351U (zh) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6543487U JPS63173351U (zh) | 1987-04-30 | 1987-04-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63173351U true JPS63173351U (zh) | 1988-11-10 |
Family
ID=30902502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6543487U Pending JPS63173351U (zh) | 1987-04-30 | 1987-04-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63173351U (zh) |
-
1987
- 1987-04-30 JP JP6543487U patent/JPS63173351U/ja active Pending