JPS63173337U - - Google Patents
Info
- Publication number
- JPS63173337U JPS63173337U JP6753187U JP6753187U JPS63173337U JP S63173337 U JPS63173337 U JP S63173337U JP 6753187 U JP6753187 U JP 6753187U JP 6753187 U JP6753187 U JP 6753187U JP S63173337 U JPS63173337 U JP S63173337U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- reaction chamber
- waveguide
- window member
- microwave window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6753187U JPS63173337U (ko) | 1987-05-06 | 1987-05-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6753187U JPS63173337U (ko) | 1987-05-06 | 1987-05-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63173337U true JPS63173337U (ko) | 1988-11-10 |
Family
ID=30906525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6753187U Pending JPS63173337U (ko) | 1987-05-06 | 1987-05-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63173337U (ko) |
-
1987
- 1987-05-06 JP JP6753187U patent/JPS63173337U/ja active Pending