JPS63172945U - - Google Patents
Info
- Publication number
- JPS63172945U JPS63172945U JP6412387U JP6412387U JPS63172945U JP S63172945 U JPS63172945 U JP S63172945U JP 6412387 U JP6412387 U JP 6412387U JP 6412387 U JP6412387 U JP 6412387U JP S63172945 U JPS63172945 U JP S63172945U
- Authority
- JP
- Japan
- Prior art keywords
- dust
- image sensor
- utility
- model registration
- linear image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims 4
- 239000000428 dust Substances 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 3
- 238000003384 imaging method Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6412387U JPS63172945U (da) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6412387U JPS63172945U (da) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172945U true JPS63172945U (da) | 1988-11-10 |
Family
ID=30899993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6412387U Pending JPS63172945U (da) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172945U (da) |
-
1987
- 1987-04-30 JP JP6412387U patent/JPS63172945U/ja active Pending
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