JPS63172612U - - Google Patents
Info
- Publication number
- JPS63172612U JPS63172612U JP6514587U JP6514587U JPS63172612U JP S63172612 U JPS63172612 U JP S63172612U JP 6514587 U JP6514587 U JP 6514587U JP 6514587 U JP6514587 U JP 6514587U JP S63172612 U JPS63172612 U JP S63172612U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- sheet
- dividing
- element formation
- opposite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6514587U JPS63172612U (pt-PT) | 1987-04-28 | 1987-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6514587U JPS63172612U (pt-PT) | 1987-04-28 | 1987-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172612U true JPS63172612U (pt-PT) | 1988-11-09 |
Family
ID=30901949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6514587U Pending JPS63172612U (pt-PT) | 1987-04-28 | 1987-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172612U (pt-PT) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014031002A (ja) * | 2012-08-02 | 2014-02-20 | Mitsuboshi Diamond Industrial Co Ltd | 脆性材料基板のローリングブレーク装置 |
-
1987
- 1987-04-28 JP JP6514587U patent/JPS63172612U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014031002A (ja) * | 2012-08-02 | 2014-02-20 | Mitsuboshi Diamond Industrial Co Ltd | 脆性材料基板のローリングブレーク装置 |
| JP2018030376A (ja) * | 2012-08-02 | 2018-03-01 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のローリングブレーク装置 |