JPS63171708U - - Google Patents

Info

Publication number
JPS63171708U
JPS63171708U JP6452087U JP6452087U JPS63171708U JP S63171708 U JPS63171708 U JP S63171708U JP 6452087 U JP6452087 U JP 6452087U JP 6452087 U JP6452087 U JP 6452087U JP S63171708 U JPS63171708 U JP S63171708U
Authority
JP
Japan
Prior art keywords
disk
clock device
pad member
clean room
lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6452087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6452087U priority Critical patent/JPS63171708U/ja
Publication of JPS63171708U publication Critical patent/JPS63171708U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Braking Arrangements (AREA)
  • Ventilation (AREA)
JP6452087U 1987-04-28 1987-04-28 Pending JPS63171708U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6452087U JPS63171708U (enrdf_load_stackoverflow) 1987-04-28 1987-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6452087U JPS63171708U (enrdf_load_stackoverflow) 1987-04-28 1987-04-28

Publications (1)

Publication Number Publication Date
JPS63171708U true JPS63171708U (enrdf_load_stackoverflow) 1988-11-08

Family

ID=30900752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6452087U Pending JPS63171708U (enrdf_load_stackoverflow) 1987-04-28 1987-04-28

Country Status (1)

Country Link
JP (1) JPS63171708U (enrdf_load_stackoverflow)

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