JPS63170952U - - Google Patents
Info
- Publication number
- JPS63170952U JPS63170952U JP6320787U JP6320787U JPS63170952U JP S63170952 U JPS63170952 U JP S63170952U JP 6320787 U JP6320787 U JP 6320787U JP 6320787 U JP6320787 U JP 6320787U JP S63170952 U JPS63170952 U JP S63170952U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- main body
- frame
- corners
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Stackable Containers (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6320787U JPS63170952U (tr) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6320787U JPS63170952U (tr) | 1987-04-24 | 1987-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63170952U true JPS63170952U (tr) | 1988-11-07 |
Family
ID=30898221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6320787U Pending JPS63170952U (tr) | 1987-04-24 | 1987-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63170952U (tr) |
-
1987
- 1987-04-24 JP JP6320787U patent/JPS63170952U/ja active Pending