JPS63170936U - - Google Patents
Info
- Publication number
- JPS63170936U JPS63170936U JP6149087U JP6149087U JPS63170936U JP S63170936 U JPS63170936 U JP S63170936U JP 6149087 U JP6149087 U JP 6149087U JP 6149087 U JP6149087 U JP 6149087U JP S63170936 U JPS63170936 U JP S63170936U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- matching box
- time constant
- selection circuit
- high frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149087U JPS63170936U (de) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149087U JPS63170936U (de) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170936U true JPS63170936U (de) | 1988-11-07 |
Family
ID=30894878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6149087U Pending JPS63170936U (de) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170936U (de) |
-
1987
- 1987-04-24 JP JP6149087U patent/JPS63170936U/ja active Pending