JPS63170706U - - Google Patents
Info
- Publication number
- JPS63170706U JPS63170706U JP6385187U JP6385187U JPS63170706U JP S63170706 U JPS63170706 U JP S63170706U JP 6385187 U JP6385187 U JP 6385187U JP 6385187 U JP6385187 U JP 6385187U JP S63170706 U JPS63170706 U JP S63170706U
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- conversion element
- arithmetic unit
- calculates
- inspection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000003746 surface roughness Effects 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6385187U JPS63170706U (pt) | 1987-04-27 | 1987-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6385187U JPS63170706U (pt) | 1987-04-27 | 1987-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170706U true JPS63170706U (pt) | 1988-11-07 |
Family
ID=30899465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6385187U Pending JPS63170706U (pt) | 1987-04-27 | 1987-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170706U (pt) |
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1987
- 1987-04-27 JP JP6385187U patent/JPS63170706U/ja active Pending