JPS63170467U - - Google Patents

Info

Publication number
JPS63170467U
JPS63170467U JP6502487U JP6502487U JPS63170467U JP S63170467 U JPS63170467 U JP S63170467U JP 6502487 U JP6502487 U JP 6502487U JP 6502487 U JP6502487 U JP 6502487U JP S63170467 U JPS63170467 U JP S63170467U
Authority
JP
Japan
Prior art keywords
glass tube
barrel
quartz
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6502487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6502487U priority Critical patent/JPS63170467U/ja
Publication of JPS63170467U publication Critical patent/JPS63170467U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6502487U 1987-04-28 1987-04-28 Pending JPS63170467U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6502487U JPS63170467U (enrdf_load_html_response) 1987-04-28 1987-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6502487U JPS63170467U (enrdf_load_html_response) 1987-04-28 1987-04-28

Publications (1)

Publication Number Publication Date
JPS63170467U true JPS63170467U (enrdf_load_html_response) 1988-11-07

Family

ID=30901718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6502487U Pending JPS63170467U (enrdf_load_html_response) 1987-04-28 1987-04-28

Country Status (1)

Country Link
JP (1) JPS63170467U (enrdf_load_html_response)

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