JPS63170461U - - Google Patents
Info
- Publication number
- JPS63170461U JPS63170461U JP6310287U JP6310287U JPS63170461U JP S63170461 U JPS63170461 U JP S63170461U JP 6310287 U JP6310287 U JP 6310287U JP 6310287 U JP6310287 U JP 6310287U JP S63170461 U JPS63170461 U JP S63170461U
- Authority
- JP
- Japan
- Prior art keywords
- bucking plate
- bucking
- plate
- cooling
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 239000012809 cooling fluid Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6310287U JPS63170461U (enExample) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6310287U JPS63170461U (enExample) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170461U true JPS63170461U (enExample) | 1988-11-07 |
Family
ID=30898012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6310287U Pending JPS63170461U (enExample) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170461U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014051746A (ja) * | 2002-10-24 | 2014-03-20 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |
-
1987
- 1987-04-24 JP JP6310287U patent/JPS63170461U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014051746A (ja) * | 2002-10-24 | 2014-03-20 | Honeywell Internatl Inc | 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法 |