JPS63170459U - - Google Patents
Info
- Publication number
- JPS63170459U JPS63170459U JP6149187U JP6149187U JPS63170459U JP S63170459 U JPS63170459 U JP S63170459U JP 6149187 U JP6149187 U JP 6149187U JP 6149187 U JP6149187 U JP 6149187U JP S63170459 U JPS63170459 U JP S63170459U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- sputtering apparatus
- processed
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149187U JPS63170459U (cs) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149187U JPS63170459U (cs) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170459U true JPS63170459U (cs) | 1988-11-07 |
Family
ID=30894880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6149187U Pending JPS63170459U (cs) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170459U (cs) |
-
1987
- 1987-04-24 JP JP6149187U patent/JPS63170459U/ja active Pending