JPS63170457U - - Google Patents

Info

Publication number

JPS63170457U

JPS63170457U JP6268487U JP6268487U JPS63170457U JP S63170457 U JPS63170457 U JP S63170457U JP 6268487 U JP6268487 U JP 6268487U JP 6268487 U JP6268487 U JP 6268487U JP S63170457 U JPS63170457 U JP S63170457U

Authority

JP

Japan

Prior art keywords

vacuum

vacuum chamber

evaporation

utilizes

power source

Prior art date

1987-04-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
• 229910052799 carbon Inorganic materials 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims 1
• 230000008020 evaporation Effects 0.000 claims 1
• 238000007738 vacuum evaporation Methods 0.000 claims 1
• 239000012212 insulator Substances 0.000 description 2
• 239000011521 glass Substances 0.000 description 1