JPS63170456U - - Google Patents
Info
- Publication number
- JPS63170456U JPS63170456U JP6298087U JP6298087U JPS63170456U JP S63170456 U JPS63170456 U JP S63170456U JP 6298087 U JP6298087 U JP 6298087U JP 6298087 U JP6298087 U JP 6298087U JP S63170456 U JPS63170456 U JP S63170456U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- communicates
- dust collector
- gas cylinder
- outlet tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062980U JPH0543088Y2 (sv) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062980U JPH0543088Y2 (sv) | 1987-04-24 | 1987-04-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170456U true JPS63170456U (sv) | 1988-11-07 |
| JPH0543088Y2 JPH0543088Y2 (sv) | 1993-10-29 |
Family
ID=30897775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987062980U Expired - Lifetime JPH0543088Y2 (sv) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543088Y2 (sv) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59133336A (ja) * | 1982-10-22 | 1984-07-31 | メカンアルベツト・ドンメルダンジエ・エス・ア・エ−ル・エル | 精錬工程中に金属浴に気体および固体物質を供給する装置 |
-
1987
- 1987-04-24 JP JP1987062980U patent/JPH0543088Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59133336A (ja) * | 1982-10-22 | 1984-07-31 | メカンアルベツト・ドンメルダンジエ・エス・ア・エ−ル・エル | 精錬工程中に金属浴に気体および固体物質を供給する装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543088Y2 (sv) | 1993-10-29 |