JPS63170091U - - Google Patents

Info

Publication number
JPS63170091U
JPS63170091U JP1987062212U JP6221287U JPS63170091U JP S63170091 U JPS63170091 U JP S63170091U JP 1987062212 U JP1987062212 U JP 1987062212U JP 6221287 U JP6221287 U JP 6221287U JP S63170091 U JPS63170091 U JP S63170091U
Authority
JP
Japan
Prior art keywords
vacuum
lower plate
upper plate
workpiece
lattice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987062212U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987062212U priority Critical patent/JPS63170091U/ja
Publication of JPS63170091U publication Critical patent/JPS63170091U/ja
Pending legal-status Critical Current

Links

JP1987062212U 1987-04-23 1987-04-23 Pending JPS63170091U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987062212U JPS63170091U (enrdf_load_stackoverflow) 1987-04-23 1987-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987062212U JPS63170091U (enrdf_load_stackoverflow) 1987-04-23 1987-04-23

Publications (1)

Publication Number Publication Date
JPS63170091U true JPS63170091U (enrdf_load_stackoverflow) 1988-11-04

Family

ID=30896269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987062212U Pending JPS63170091U (enrdf_load_stackoverflow) 1987-04-23 1987-04-23

Country Status (1)

Country Link
JP (1) JPS63170091U (enrdf_load_stackoverflow)

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