JPS63170091U - - Google Patents
Info
- Publication number
- JPS63170091U JPS63170091U JP1987062212U JP6221287U JPS63170091U JP S63170091 U JPS63170091 U JP S63170091U JP 1987062212 U JP1987062212 U JP 1987062212U JP 6221287 U JP6221287 U JP 6221287U JP S63170091 U JPS63170091 U JP S63170091U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- lower plate
- upper plate
- workpiece
- lattice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000903 blocking effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062212U JPS63170091U (cs) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062212U JPS63170091U (cs) | 1987-04-23 | 1987-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170091U true JPS63170091U (cs) | 1988-11-04 |
Family
ID=30896269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987062212U Pending JPS63170091U (cs) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170091U (cs) |
-
1987
- 1987-04-23 JP JP1987062212U patent/JPS63170091U/ja active Pending
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