JPS63169286U - - Google Patents
Info
- Publication number
- JPS63169286U JPS63169286U JP6112087U JP6112087U JPS63169286U JP S63169286 U JPS63169286 U JP S63169286U JP 6112087 U JP6112087 U JP 6112087U JP 6112087 U JP6112087 U JP 6112087U JP S63169286 U JPS63169286 U JP S63169286U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chuck
- lands
- grooves
- vacuum
- chuck grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Automatic Assembly (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987061120U JPH0511991Y2 (en, 2012) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987061120U JPH0511991Y2 (en, 2012) | 1987-04-22 | 1987-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63169286U true JPS63169286U (en, 2012) | 1988-11-04 |
| JPH0511991Y2 JPH0511991Y2 (en, 2012) | 1993-03-25 |
Family
ID=30894162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987061120U Expired - Lifetime JPH0511991Y2 (en, 2012) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0511991Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016042500A (ja) * | 2014-08-14 | 2016-03-31 | 株式会社ディスコ | 搬送装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5041259U (en, 2012) * | 1973-08-14 | 1975-04-26 | ||
| JPS5718991U (en, 2012) * | 1980-07-02 | 1982-01-30 |
-
1987
- 1987-04-22 JP JP1987061120U patent/JPH0511991Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5041259U (en, 2012) * | 1973-08-14 | 1975-04-26 | ||
| JPS5718991U (en, 2012) * | 1980-07-02 | 1982-01-30 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016042500A (ja) * | 2014-08-14 | 2016-03-31 | 株式会社ディスコ | 搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0511991Y2 (en, 2012) | 1993-03-25 |