JPS63169286U - - Google Patents

Info

Publication number
JPS63169286U
JPS63169286U JP6112087U JP6112087U JPS63169286U JP S63169286 U JPS63169286 U JP S63169286U JP 6112087 U JP6112087 U JP 6112087U JP 6112087 U JP6112087 U JP 6112087U JP S63169286 U JPS63169286 U JP S63169286U
Authority
JP
Japan
Prior art keywords
vacuum chuck
lands
grooves
vacuum
chuck grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6112087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511991Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987061120U priority Critical patent/JPH0511991Y2/ja
Publication of JPS63169286U publication Critical patent/JPS63169286U/ja
Application granted granted Critical
Publication of JPH0511991Y2 publication Critical patent/JPH0511991Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Automatic Assembly (AREA)
JP1987061120U 1987-04-22 1987-04-22 Expired - Lifetime JPH0511991Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987061120U JPH0511991Y2 (enrdf_load_stackoverflow) 1987-04-22 1987-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987061120U JPH0511991Y2 (enrdf_load_stackoverflow) 1987-04-22 1987-04-22

Publications (2)

Publication Number Publication Date
JPS63169286U true JPS63169286U (enrdf_load_stackoverflow) 1988-11-04
JPH0511991Y2 JPH0511991Y2 (enrdf_load_stackoverflow) 1993-03-25

Family

ID=30894162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987061120U Expired - Lifetime JPH0511991Y2 (enrdf_load_stackoverflow) 1987-04-22 1987-04-22

Country Status (1)

Country Link
JP (1) JPH0511991Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016042500A (ja) * 2014-08-14 2016-03-31 株式会社ディスコ 搬送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5041259U (enrdf_load_stackoverflow) * 1973-08-14 1975-04-26
JPS5718991U (enrdf_load_stackoverflow) * 1980-07-02 1982-01-30

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5041259U (enrdf_load_stackoverflow) * 1973-08-14 1975-04-26
JPS5718991U (enrdf_load_stackoverflow) * 1980-07-02 1982-01-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016042500A (ja) * 2014-08-14 2016-03-31 株式会社ディスコ 搬送装置

Also Published As

Publication number Publication date
JPH0511991Y2 (enrdf_load_stackoverflow) 1993-03-25

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