JPS63168900U - - Google Patents

Info

Publication number

JPS63168900U

JPS63168900U JP6291087U JP6291087U JPS63168900U JP S63168900 U JPS63168900 U JP S63168900U JP 6291087 U JP6291087 U JP 6291087U JP 6291087 U JP6291087 U JP 6291087U JP S63168900 U JPS63168900 U JP S63168900U

Authority

JP

Japan

Prior art keywords

secondary window

foil

window

partition wall

electron beam

Prior art date

1987-04-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011888 foil Substances 0.000 claims description 14
• 238000005192 partition Methods 0.000 claims description 5
• 238000010894 electron beam technology Methods 0.000 claims 4
• 230000002093 peripheral effect Effects 0.000 claims 2

Cited By (1)