JPS63168729U - - Google Patents

Info

Publication number
JPS63168729U
JPS63168729U JP1987061043U JP6104387U JPS63168729U JP S63168729 U JPS63168729 U JP S63168729U JP 1987061043 U JP1987061043 U JP 1987061043U JP 6104387 U JP6104387 U JP 6104387U JP S63168729 U JPS63168729 U JP S63168729U
Authority
JP
Japan
Prior art keywords
chamber
port
suction port
exhaust port
partition plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987061043U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987061043U priority Critical patent/JPS63168729U/ja
Publication of JPS63168729U publication Critical patent/JPS63168729U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Duct Arrangements (AREA)
JP1987061043U 1987-04-22 1987-04-22 Pending JPS63168729U (et)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987061043U JPS63168729U (et) 1987-04-22 1987-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987061043U JPS63168729U (et) 1987-04-22 1987-04-22

Publications (1)

Publication Number Publication Date
JPS63168729U true JPS63168729U (et) 1988-11-02

Family

ID=30894015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987061043U Pending JPS63168729U (et) 1987-04-22 1987-04-22

Country Status (1)

Country Link
JP (1) JPS63168729U (et)

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