JPS63168528A - Pressure sensor device - Google Patents
Pressure sensor deviceInfo
- Publication number
- JPS63168528A JPS63168528A JP31196786A JP31196786A JPS63168528A JP S63168528 A JPS63168528 A JP S63168528A JP 31196786 A JP31196786 A JP 31196786A JP 31196786 A JP31196786 A JP 31196786A JP S63168528 A JPS63168528 A JP S63168528A
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- housing
- cap
- sensor
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000007769 metal material Substances 0.000 claims description 2
- 238000003466 welding Methods 0.000 abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 238000009792 diffusion process Methods 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 2
- 230000006698 induction Effects 0.000 abstract 1
- 238000003860 storage Methods 0.000 description 12
- 239000003566 sealing material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、キャップやベースプレートが金属製である圧
力センサをコンパクトな筒形のハウジング内に気密に収
めた圧力センサ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a pressure sensor device in which a pressure sensor whose cap and base plate are made of metal is hermetically housed in a compact cylindrical housing.
〈従来の技術〉
圧力センサを使用する場合には、一般にこの圧力センサ
をハウジング内に収め、このハウジングを介して、所望
の機器に取り付けることが多い。<Prior Art> When using a pressure sensor, the pressure sensor is generally housed in a housing and is often attached to a desired device via the housing.
つまり、このセンサ収納用のハウジングにセンサの保護
機能と取付手段を兼ねさせていることが多い。In other words, the sensor housing housing often serves both as a sensor protection function and as a mounting means.
従って、当然、ハウジング内において、圧力センサの被
測定気体の圧力導入孔側と、他の部分、例えばセンサ後
端の電極側等との間は気密に保たれなければならない。Therefore, it is a matter of course that airtightness must be maintained between the pressure sensor's pressure introduction hole side for the gas to be measured and other parts, such as the electrode side at the rear end of the sensor, in the housing.
そこで、従来は、一般にハウジング内面と圧力センサの
シール用キャップとの間に０リング等のシール材を用い
て気密性を保っていた。Therefore, conventionally, a sealing material such as an O-ring was generally used between the inner surface of the housing and the sealing cap of the pressure sensor to maintain airtightness.
〈発明が解決しようとする問題点〉
ところが、このようなシール材を用いる構造だと、先ず
、比較的コンパクトなハウジングの所望部位にシール用
溝等を設けなければならず、製造上、不利であるのみな
らず、組立の段階においても、作業工数が増える等の好
ましくない問題が生じていた。<Problems to be Solved by the Invention> However, in a structure using such a sealing material, a sealing groove etc. must first be provided at a desired location of a relatively compact housing, which is disadvantageous in terms of manufacturing. Not only this, but also undesirable problems such as an increase in the number of man-hours have occurred during the assembly stage.
本発明は、このような従来の問題点に鑑みてなされたも
のである。The present invention has been made in view of such conventional problems.
く問題点を解決するための手段〉
か−る本発明の特徴とする点は、キャップやベースプレ
ートが金属製である圧力センサをハウジング内に気密に
収めた圧力センサ装置において、前記ハウジングの少な
くとも一部を金属材料で形成すると共に、該ハウジング
の金属製部分と前記センサのキャップ又は／及びベース
プレートとを溶接結合により、気密封止させた圧力セン
サ装置にある。Means for Solving Problems> The present invention is characterized in that in a pressure sensor device in which a pressure sensor whose cap and base plate are made of metal is hermetically housed in a housing, at least one portion of the housing is The pressure sensor device has a portion made of a metal material, and the metal portion of the housing and the cap and/or base plate of the sensor are hermetically sealed by welding.
〈作用〉
本発明では、圧力センサの金属部分がハウジングの金属
部分に溶接結合されるため、測定対象側は高い気密性が
保持され、０リング等のようなシール材は不要となる。<Operation> In the present invention, since the metal part of the pressure sensor is welded to the metal part of the housing, high airtightness is maintained on the side to be measured, and a sealing material such as an O-ring is not required.
〈実施例〉
第１図〜第２図は本発明に係る圧力センサ装置の一例を
示したものである。<Example> FIGS. 1 and 2 show an example of a pressure sensor device according to the present invention.
図において、ｌは圧力センサ、２はこのセンサ１が収納
されるハウジングである。In the figure, 1 is a pressure sensor, and 2 is a housing in which this sensor 1 is housed.
この圧力センサ１は、電極脚３の貫通部分近傍を除き、
少なくとも周縁部が金属製でなるベースプレート４上に
金属製キャップ５が被冠されたものであって、該キャッ
プ底辺の鍔状周縁部５′が上記ベースプレート４と一体
に溶接接合されている。そして、キャップ５の内部には
、図示しないが、シリコンダイヤフラム面にピエゾ拡散
抵抗が形成された圧力センサ素子が内蔵され、該圧力セ
ンサ素子はキョップ５の適宜箇所に開けられた圧力導入
孔を介して測定対象の圧力変動を検出するものである。This pressure sensor 1 has, except for the vicinity of the penetrating portion of the electrode leg 3
A metal cap 5 is mounted on a base plate 4 whose at least a peripheral edge portion is made of metal, and a brim-shaped peripheral edge portion 5' at the bottom of the cap is integrally welded to the base plate 4. Although not shown, a pressure sensor element in which a piezo diffusion resistance is formed on a silicon diaphragm surface is built into the cap 5, and the pressure sensor element is connected to the cap 5 through a pressure introduction hole opened at an appropriate location in the cap 5. This method detects pressure fluctuations in the object to be measured.
上記ハウジング２は、先端側の前部筒体１１と後端側の
後部筒体１２からなり、少なくとも前部筒体１１は金属
製である。The housing 2 includes a front cylinder 11 on the front end side and a rear cylinder 12 on the rear end side, and at least the front cylinder 11 is made of metal.
この前部筒体１１はその先端に突出した小径突出部１１
ａを有し、この突出部１１ａの外周には取付は対象機器
への取付用雄ねじ部１３が形成されており、又この小径
突出部１１ａの軸方向には圧力導入孔１４が穿設され、
その内部側はこの前部筒体胴部１１ｂ内に形成された拡
径のセンサ収納室Ｒａに連通されている。このセンサ収
納室Ｒａは上記圧力センサ１のキャップ５部分を収納す
る部分で、好ましくはキャップ５部分を気密状態で嵌合
するとよい、この嵌合されたキャップ５外周とセンサ収
納室Ｒａの開口部Ｒａ’との接触する部分はその全周に
渡って溶接接合する。この部分を拡大すると、第２図の
如くで、開口部Ｒａ’にはキャップ５の鍔状周縁部５′
に沿って環状のリブ１１′が突出されており、このリプ
１１′がキャップ５の鍔状周縁部５′と接合されるので
ある。This front cylinder 11 has a small diameter protrusion 11 protruding from its tip.
A, a male threaded portion 13 for attachment to the target device is formed on the outer periphery of this protrusion 11a, and a pressure introduction hole 14 is bored in the axial direction of this small diameter protrusion 11a.
The inside thereof is communicated with an enlarged diameter sensor storage chamber Ra formed within the front cylindrical body portion 11b. This sensor storage chamber Ra is a portion that stores the cap 5 portion of the pressure sensor 1, and it is preferable that the cap 5 portion is fitted in an airtight state.The outer periphery of the fitted cap 5 and the opening of the sensor storage chamber Ra are The portion in contact with Ra' is welded over its entire circumference. When this part is enlarged, it is as shown in FIG.
An annular rib 11' is projected along the cap 5, and this lip 11' is joined to the brim-shaped peripheral edge 5' of the cap 5.
この際の溶接としては、特に限定されないが、例えば抵
抗溶接等が挙げられる。この溶接により、圧力センサ１
の金属製キャップ５とハウジング前部筒体１１のセンサ
収納室開口部Ｒａ’とは機械的に強く、高い気密性を持
ってシールされる。尚、この溶接接合において、センサ
収納室開口部Ｒａ′は、金属製ベースプレート４側と溶
接してもよく、更には当該プレート４及びキャップ５と
の両者と溶接することも、溶接の条件、開口部Ｒａ’の
形状等を適宜選択すれば可能である。Welding at this time is not particularly limited, but examples include resistance welding. By this welding, pressure sensor 1
The metal cap 5 and the sensor storage chamber opening Ra' of the housing front cylindrical body 11 are mechanically strong and sealed with high airtightness. In this welding, the sensor storage chamber opening Ra' may be welded to the metal base plate 4 side, or may be welded to both the plate 4 and the cap 5 depending on the welding conditions and the opening. This is possible by appropriately selecting the shape of the portion Ra'.
上記後部筒体１２は、内部に上記前部筒体１１のセンサ
収納室Ｒａと対応した拡径のセンサ収納室Ｒｂを有し、
このセンサ収納室Ｒｂに圧力センサ１のベースプレート
４側の基部及び電極脚３部分を収納し、その前方の更に
大きく拡径させた内面には雌ねじ部１５が形成され、こ
の雌ねじ部１５を上記前部筒体胴部１１ｂの後端の縮径
した段部の外周に形成された雄ねじ部１６に螺着させで
ある。もっとも、ねじ部を省略し、この部分を接着剤等
で密に接着させても良い。又、この後部筒体１２の後端
の貫通穴１７には圧力センサｌの電極脚３と接続された
コード１８が通され、更に後部筒体１２の後端に形成さ
れた引掛用の鍔部１２ａには弾性体（ゴム、軟質プラス
チック等）からなる断面円錐台形状のコードカバ１９が
装着されている。The rear cylinder 12 has an enlarged diameter sensor storage chamber Rb corresponding to the sensor storage chamber Ra of the front cylinder 11 inside,
The base of the pressure sensor 1 on the base plate 4 side and the electrode leg 3 portion are stored in this sensor storage chamber Rb, and a female threaded portion 15 is formed on the inner surface with a larger diameter in front of the pressure sensor 1. It is screwed onto a male threaded portion 16 formed on the outer periphery of a diameter-reduced stepped portion at the rear end of the barrel body portion 11b. However, the threaded portion may be omitted and this portion may be tightly bonded with an adhesive or the like. A cord 18 connected to the electrode leg 3 of the pressure sensor I is passed through the through hole 17 at the rear end of the rear cylinder 12, and a hooking collar formed at the rear end of the rear cylinder 12 is inserted. A cord cover 19 made of an elastic material (rubber, soft plastic, etc.) and having a truncated conical cross section is attached to the cord cover 12a.
か−る構造の零圧カセンサ装置の使用に当たっては、ハ
ウジング前部筒体１１の突出部１１ａをその雄ねじ部工
３を介して、取付は機器の所望の部位にねじ込み固定し
、外部の電源から内部の圧力センサ素子部分に通電して
、測定動作させればよい。When using a zero-pressure sensor device with such a structure, the protruding portion 11a of the front cylinder 11 of the housing is screwed into a desired part of the device via its male threaded part 3, and the device is connected to an external power source. All that is required is to energize the internal pressure sensor element portion to perform a measurement operation.
このとき、上述したようにハウジング前部筒体１１のセ
ンサ収納室Ｒａとセンサ１の金属製キャップ５や金属製
ベースプレート４とは溶接接合により完全に密閉されて
いるため、後部筒体１２のセンサ収納室Ｒｂ側から気密
漏れすることはなく、常に高精度での圧力測定が可能と
なる。At this time, since the sensor storage chamber Ra of the housing front cylinder 11 and the metal cap 5 and metal base plate 4 of the sensor 1 are completely sealed by welding, as described above, the sensor storage chamber Ra of the housing front cylinder 11 is completely sealed by welding. There is no airtight leakage from the storage chamber Rb side, making it possible to always measure pressure with high accuracy.
〈発明の効果〉
以上の説明から明らかなように本発明によれば、キャッ
プやベースプレートが金属製である圧力センサをハウジ
ング内に気密に収めた圧力センサ装置において、前記ハ
ウジングの少なくとも一部を金属材料で形成すると共に
、該ハウジングの金属製部分と前記センサのキャップ又
は／及びベースプレートとを溶接結合させであるため、
高い気密性が得られ、高精度での圧力測定が可能となる
他、従来のようにＯリング等のシール材の使用が不要と
なるので、製造及び組立上のコスト低減を図ることがで
きる利点がある。<Effects of the Invention> As is clear from the above description, according to the present invention, in a pressure sensor device in which a pressure sensor whose cap and base plate are made of metal is hermetically housed in a housing, at least a portion of the housing is made of metal. The metal part of the housing is welded to the cap and/or the base plate of the sensor, and
In addition to achieving high airtightness and making it possible to measure pressure with high precision, there is no need to use conventional sealing materials such as O-rings, which has the advantage of reducing manufacturing and assembly costs. There is.
第１図は本発明に係る圧力センサ装置の一実施例を示し
た縦断側面図、第２図は溶接接合部分の拡大図である。
図中、
１・・・圧力センサ、
２・・・ハウジング、
３・・・電極層、
４・・・ベースプレート、
５・・・キャップ、
１１・・・ハウジングの前部筒体、
１１′・・・リブ、
１２・・・ハウジングの後部筒体、
１４・・・圧力導入孔、
Ｒａ、Ｒｂ・・・センサ収納室、FIG. 1 is a vertical sectional side view showing one embodiment of a pressure sensor device according to the present invention, and FIG. 2 is an enlarged view of a welded joint portion. In the figure, 1... Pressure sensor, 2... Housing, 3... Electrode layer, 4... Base plate, 5... Cap, 11... Front cylinder of housing, 11'... - Rib, 12... Rear cylinder of housing, 14... Pressure introduction hole, Ra, Rb... Sensor storage chamber,
Claims (1)
ハウジング内に気密に収めた圧力センサ装置において、
前記ハウジングの少なくとも一部を金属材料で形成する
と共に、該ハウジングの金属製部分と前記センサのキャ
ップ又は／及びベースプレートとを溶接結合させたこと
を特徴とする圧力センサ装置。In a pressure sensor device in which a pressure sensor whose cap and base plate are made of metal is hermetically housed in a housing,
A pressure sensor device, characterized in that at least a portion of the housing is formed of a metal material, and the metal portion of the housing is welded to a cap and/or a base plate of the sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31196786A JPS63168528A (en) | 1986-12-30 | 1986-12-30 | Pressure sensor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31196786A JPS63168528A (en) | 1986-12-30 | 1986-12-30 | Pressure sensor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63168528A true JPS63168528A (en) | 1988-07-12 |
Family
ID=18023590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31196786A Pending JPS63168528A (en) | 1986-12-30 | 1986-12-30 | Pressure sensor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63168528A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6389903B1 (en) | 1998-08-04 | 2002-05-21 | Denso Corporation | Pressure-detecting device coupling member with interchangeable connector part |
-
1986
- 1986-12-30 JP JP31196786A patent/JPS63168528A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6389903B1 (en) | 1998-08-04 | 2002-05-21 | Denso Corporation | Pressure-detecting device coupling member with interchangeable connector part |
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