JPS63168300U - - Google Patents

Info

Publication number
JPS63168300U
JPS63168300U JP6249887U JP6249887U JPS63168300U JP S63168300 U JPS63168300 U JP S63168300U JP 6249887 U JP6249887 U JP 6249887U JP 6249887 U JP6249887 U JP 6249887U JP S63168300 U JPS63168300 U JP S63168300U
Authority
JP
Japan
Prior art keywords
diffuser
chamber
vacuum
nozzle
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6249887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6249887U priority Critical patent/JPS63168300U/ja
Publication of JPS63168300U publication Critical patent/JPS63168300U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jet Pumps And Other Pumps (AREA)
JP6249887U 1987-04-24 1987-04-24 Pending JPS63168300U (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6249887U JPS63168300U (US20020128544A1-20020912-P00008.png) 1987-04-24 1987-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6249887U JPS63168300U (US20020128544A1-20020912-P00008.png) 1987-04-24 1987-04-24

Publications (1)

Publication Number Publication Date
JPS63168300U true JPS63168300U (US20020128544A1-20020912-P00008.png) 1988-11-01

Family

ID=30896835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6249887U Pending JPS63168300U (US20020128544A1-20020912-P00008.png) 1987-04-24 1987-04-24

Country Status (1)

Country Link
JP (1) JPS63168300U (US20020128544A1-20020912-P00008.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6088719B1 (ja) * 2015-09-17 2017-03-01 株式会社テイエルブイ エゼクタ及びそれを備えた真空発生装置
WO2017047387A1 (ja) * 2015-09-17 2017-03-23 株式会社テイエルブイ エゼクタ及びそれを備えた真空発生装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6088719B1 (ja) * 2015-09-17 2017-03-01 株式会社テイエルブイ エゼクタ及びそれを備えた真空発生装置
WO2017047387A1 (ja) * 2015-09-17 2017-03-23 株式会社テイエルブイ エゼクタ及びそれを備えた真空発生装置

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