JPS63168080U - - Google Patents
Info
- Publication number
- JPS63168080U JPS63168080U JP6285387U JP6285387U JPS63168080U JP S63168080 U JPS63168080 U JP S63168080U JP 6285387 U JP6285387 U JP 6285387U JP 6285387 U JP6285387 U JP 6285387U JP S63168080 U JPS63168080 U JP S63168080U
- Authority
- JP
- Japan
- Prior art keywords
- hanging
- track
- moving means
- cover
- protective cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285387U JPS63168080U (fi) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285387U JPS63168080U (fi) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63168080U true JPS63168080U (fi) | 1988-11-01 |
Family
ID=30897532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6285387U Pending JPS63168080U (fi) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63168080U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010150130A (ja) * | 2008-11-28 | 2010-07-08 | Mitsubishi Materials Corp | 多結晶シリコン洗浄装置及び洗浄方法 |
-
1987
- 1987-04-24 JP JP6285387U patent/JPS63168080U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010150130A (ja) * | 2008-11-28 | 2010-07-08 | Mitsubishi Materials Corp | 多結晶シリコン洗浄装置及び洗浄方法 |