JPS63168028U - - Google Patents

Info

Publication number
JPS63168028U
JPS63168028U JP5966387U JP5966387U JPS63168028U JP S63168028 U JPS63168028 U JP S63168028U JP 5966387 U JP5966387 U JP 5966387U JP 5966387 U JP5966387 U JP 5966387U JP S63168028 U JPS63168028 U JP S63168028U
Authority
JP
Japan
Prior art keywords
fluid
container
inlet pipe
pipe
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5966387U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5966387U priority Critical patent/JPS63168028U/ja
Publication of JPS63168028U publication Critical patent/JPS63168028U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は本考案に係る流体供給装置
の模式的側面図、第3図はその要部平面図、第4
図及び第5図は第3図の夫々―線及び―
線による断面図、第6図及び第7図は本案装置の
第2の実施例を示す模式的側面図、第8図は第3
の実施例を示す模式的側面図、第9図及び第10
図はその要部側面図及び平面図、第11図及び第
12図は従来品の構成図である。 11,21,31……容器、14,24,34
……配管切換部、14a,24a,34a……弁
体。
1 and 2 are schematic side views of the fluid supply device according to the present invention, FIG. 3 is a plan view of the main parts thereof, and FIG.
Figures and Figure 5 are the lines and lines in Figure 3, respectively.
6 and 7 are schematic side views showing the second embodiment of the proposed device, and FIG.
FIGS. 9 and 10 are schematic side views showing examples of the
The figure is a side view and a plan view of the main part, and FIGS. 11 and 12 are configuration diagrams of a conventional product. 11, 21, 31... Container, 14, 24, 34
... Piping switching section, 14a, 24a, 34a... Valve body.

Claims (1)

【実用新案登録請求の範囲】 容器内の第1流体中へ外部から第2流体を送入
させる送入管と、容器外へ第2流体を送出する送
出管とを備える流体供給装置において、 前記送入管及び送出管の容器内側に介装され、
送入管から送入される第2流体を第1流体中へ送
入し、又は送入させずに送出管へ送出させる2系
統の通路が形成された弁体と、 前記通路の1系統を択一的に設定すべく前記弁
体を切換える手段と を具備することを特徴とする流体供給装置。
[Claims for Utility Model Registration] A fluid supply device comprising an inlet pipe for introducing a second fluid from the outside into a first fluid in a container, and a delivery pipe for delivering the second fluid to the outside of the container, Interposed inside the container of the inlet pipe and the outlet pipe,
A valve body having two passages formed therein for sending a second fluid sent from an inlet pipe into the first fluid or sending it out to a delivery pipe without introducing the second fluid, and one of the passages. A fluid supply device comprising: means for switching the valve body for alternative setting.
JP5966387U 1987-04-20 1987-04-20 Pending JPS63168028U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5966387U JPS63168028U (en) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5966387U JPS63168028U (en) 1987-04-20 1987-04-20

Publications (1)

Publication Number Publication Date
JPS63168028U true JPS63168028U (en) 1988-11-01

Family

ID=30891363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5966387U Pending JPS63168028U (en) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPS63168028U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483661A (en) * 1987-09-25 1989-03-29 Toshiba Corp Vapor growth device by method for thermally decomposing organic metal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483661A (en) * 1987-09-25 1989-03-29 Toshiba Corp Vapor growth device by method for thermally decomposing organic metal

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