JPS63168028U - - Google Patents

Info

Publication number
JPS63168028U
JPS63168028U JP5966387U JP5966387U JPS63168028U JP S63168028 U JPS63168028 U JP S63168028U JP 5966387 U JP5966387 U JP 5966387U JP 5966387 U JP5966387 U JP 5966387U JP S63168028 U JPS63168028 U JP S63168028U
Authority
JP
Japan
Prior art keywords
fluid
container
inlet pipe
pipe
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5966387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5966387U priority Critical patent/JPS63168028U/ja
Publication of JPS63168028U publication Critical patent/JPS63168028U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP5966387U 1987-04-20 1987-04-20 Pending JPS63168028U (US07655688-20100202-C00548.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5966387U JPS63168028U (US07655688-20100202-C00548.png) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5966387U JPS63168028U (US07655688-20100202-C00548.png) 1987-04-20 1987-04-20

Publications (1)

Publication Number Publication Date
JPS63168028U true JPS63168028U (US07655688-20100202-C00548.png) 1988-11-01

Family

ID=30891363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5966387U Pending JPS63168028U (US07655688-20100202-C00548.png) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPS63168028U (US07655688-20100202-C00548.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483661A (en) * 1987-09-25 1989-03-29 Toshiba Corp Vapor growth device by method for thermally decomposing organic metal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483661A (en) * 1987-09-25 1989-03-29 Toshiba Corp Vapor growth device by method for thermally decomposing organic metal

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