JPS63167911A - Driving control device - Google Patents

Abstract

PURPOSE:To satisfactorily and exactly execute a control of a correction by converting a detecting signal of a displacement quantity of a driving means to a balanced detecting signal and transmitting it, converting the received balanced detecting signal to an unbalanced detecting signal, and correcting the displacement of the driving means. CONSTITUTION:A displacement quantity which follows up driving of a motor 22 for driving a device body 21 is detected by a detector 23, and its detecting signal is inputted to a converting and transmitting circuit 24. By a differential line driving circuit 28 of the circuit 24, the detecting signal of a balanced type and amplified, respectively. Subsequently, it is outputted to a receiving and converting circuit 25 through parallel cables 30a, 30b. Thereafter, by a differential line receiving circuit 29 of the circuit 25, the detecting signal of the balance type is converted to a detecting signal of an unbalanced type and outputted to a controlling circuit 26. Next, by the circuit 26, a correction quantity to be corrected of the displacement quantity of the motor 22 is derived and a correcting signal is outputted to a correcting and driving circuit 27. In such a way, the motor 22 is controlled and a moving extent of the body 21 is corrected.

Description

[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a drive control device.

(Prior Art) In general, semiconductor manufacturing equipment such as wire bonder equipment and chip mount equipment is equipped with a drive device that performs operations in the manufacturing process (component positioning operation, bonding operation, etc.), and this drive device and The control device that controls the drive device is configured separately for ease of assembly, maintenance, inspection, and adjustment of the device, and these devices are connected by signal cables so that the control device can control the drive device. It is being done.

Examples of such drive control devices include the following.

FIG. 3 shows a conventional drive control device, in which 1 is a main body of the device that performs predetermined operations such as an XY table, 2 is a motor that drives the device main body 1, and 3 is a motor that drives the motor 2. 4 is a transmitting circuit for transmitting an unbalanced detection signal detected by the detector 3; 5 is an unbalanced detection signal transmitted by the transmitting circuit 4; A receiving circuit 6 receives the detection signal, a control circuit 6 determines the correction amount to be corrected for the displacement of the motor 2 based on the received unbalanced detection signal, and outputs a correction signal. This is a correction drive circuit that drives the motor 2 so as to correct the amount of displacement.

Further, FIG. 4 shows a connection circuit between the transmitting circuit 4 and the receiving circuit 5 in FIG. 3, and the unbalanced detection signal output from the detector 3 explained in FIG. The control port # shown in FIG. 3 is input from the line drive circuit 8 to the unbalanced line receive circuit 10 via the signal cable 9.
A detection signal is output to 16. Note 1
1 is a signal ground.

In the conventional drive control device configured in this way,
Drive control of the device body is performed as follows.

First, the amount of displacement accompanying the drive of the motor 2 is detected by the detector 3, which is a rotary encoder, and an unbalanced detection signal is output. This detection signal is then amplified by the line drive circuit 8 of the transmitting circuit 4, which is an amplifier circuit, and is output to the control circuit 6 via the receiving circuit 5. Then, the control circuit 6 determines the amount of correction to be made to the amount of displacement of the motor 2, and outputs this correction signal to the correction drive circuit 7 to control the drive of the motor 2. As a result, the amount of movement of the apparatus main body 1 (for example, the amount by which the position is corrected in positioning) is corrected.

(Problems to be Solved by the Invention) However, in the conventional drive control device configured in this way, the unbalanced detection signal detected by the detector 3 and transmitted from the transmitting circuit 4 is There is a problem in that noise, which is pulses from other devices, is mixed in, making it impossible to obtain an accurate correction amount in the control circuit 6, and as a result, it is difficult to properly control the amount of drive of the device body 1. Ta.

The present invention is intended to solve the above-mentioned conventional problems, and its objective is to provide a drive control device that can perform correction control in the operation of the device in a good and reliable manner.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention includes a driving means for performing a predetermined displacement operation, and detecting the amount of displacement of the driving means and outputting a detection signal. a detection means, a conversion and transmission means for converting the detected detection signal into an equilibrium detection signal and transmitting it, a reception conversion means for receiving the transmitted equilibrium detection signal and converting it into an unbalance detection signal, and a converted unbalance detection signal. a control means for determining a correction amount to be corrected for the displacement amount of the drive means based on a detection signal and outputting a correction signal; and a correction drive means for driving the drive means so as to correct the displacement amount using the correction signal. It is equipped with the following.

(Function) The present invention converts the detection signal of the displacement amount of the driving means detected by the detection means into an equilibrium detection signal and transmits it, and converts the received equilibrium detection signal into an unbalance detection signal to detect the imbalance. Since the displacement amount of the driving means is controlled to be corrected based on the detection signal, correction control in the operation of the device can be performed satisfactorily and reliably.

(Example) An example of the present invention will be described in detail below based on the drawings.

FIG. 1 shows a drive control device according to an embodiment of the present invention. In the figure, 21 is a main body of the device in which a predetermined displacement operation of, for example, an XY table is performed, 22 is a motor that drives the main body of the device, 23 is a detector such as a rotary encoder that detects the amount of displacement caused by driving the motor 22 and outputs a balanced detection signal; 24 is a conversion transmitter that converts the detected detection signal into a balanced detection signal and transmits it. A circuit 25 receives a transmitted balanced detection signal and converts it into an unbalanced detection signal, and 26 corrects the displacement of the motor 22 based on the converted unbalanced detection signal. A control circuit 27 calculates the amount of correction to be made and outputs a correction signal, and 27 is a correction drive circuit that drives the motor 22 so as to correct the amount of displacement of the motor 22 based on the output correction signal.

Further, FIG. 2 shows a connection circuit between the conversion/transmission circuit 24 and the reception/conversion circuit 25. In FIG.

In the figure, 28 is a differential line drive circuit which is a differential input differential output amplification circuit of the conversion/transmission circuit 24, and 29 is a differential line receive circuit which is a differential amplification circuit of the reception/conversion circuit 25. The line drive circuit 28 and the differential line receive circuit 29 are of a balanced type, and are connected to each other by parallel cables 30a, 30a.

In this rgJ path, the detection signals outputted from the detector 23, which is a rotary encoder shown in FIG. This is a pulse signal with . These detection signals are each amplified by a differential line drive circuit 28 and sent to a parallel cable 30 connected to this circuit.
The signal is inputted to the differential line receive circuit 29 via lines 30a and 30a, converted into an unbalanced detection signal, and outputted to the control circuit 26 shown in FIG.

In the drive control device configured as described above, drive control of the device main body is performed in the following manner.

First, the amount of displacement accompanying the drive of the motor 22 that drives the device main body 21 is detected by the detector 23, and the detected signal is input to the conversion and transmission circuit 24. Then, the detection signal is converted into a balanced detection signal by the differential line drive circuit 28 of the conversion/transmission circuit 24 and amplified. The signal is then output to the reception conversion circuit 25 via the parallel cables 30a, 30a. Thereafter, the differential line receive circuit R29 of the reception conversion circuit 25 converts the balanced detection signal into an unbalanced detection signal and outputs it to the control circuit 26. and control circuit 2
6, the correction amount to be corrected for the displacement amount of the motor 22 is determined, and the correction signal is corrected rIE! It is output to lJ@path 27. As a result, the motor 22 is controlled and the movement I of the apparatus main body 21 is corrected.

Therefore, in this embodiment, the detection signal output from the detector 23 is converted into a balanced detection signal and transmitted, so even if noise from the device itself or other devices is mixed in, it will not be affected by the noise. The device can be controlled well and reliably without any problems.

[Effects of the Invention] As explained above, the drive control device of the present invention converts the detection signal of the displacement/amount of the drive means detected by the detection means into an equilibrium detection signal, transmits it, and converts the received equilibrium detection signal into an imbalance detection signal. Since the displacement amount of the driving means is controlled to be corrected based on the unbalance detection signal after converting it into an equilibrium detection signal, the correction control in the operation of the apparatus can be carried out well and reliably.

[Brief Description of the Drawings] Fig. 1 is a block diagram for explaining a drive control device according to an embodiment of the present invention, Fig. 2 is a circuit diagram for explaining the connection circuit of Fig. 1, and Fig. 3 is a block diagram for explaining a drive control device according to an embodiment of the present invention. 4 is a block diagram for explaining a conventional drive MW device, and FIG. 4 is a circuit diagram for explaining the connection circuit of FIG. 3. 21...... Device body 22... Motor 23... Detector 24... Conversion and transmission circuit 25. ......Reception conversion circuit 26...Control circuit 27...Correction drive circuit 28...Differential line drive Circuit 29・
......Differential line receive circuit applicant
Toshiba Corporation Representative Patent Attorney Sasa Suyama - Figure 1 Figure 3

Claims (1)

[Claims] (1) a driving means for performing a predetermined displacement operation, a detecting means for detecting the amount of displacement of the driving means and outputting a detection signal, and a conversion transmitting means for converting the detected detection signal into an equilibrium detection signal and transmitting it; a reception converter that receives the transmitted balance detection signal and converts it into an unbalance detection signal; and a reception converter that determines a correction amount to be corrected for the displacement amount of the drive means based on the converted unbalance detection signal and outputs a correction signal. A drive control device comprising: a control means for correcting the displacement amount; and a correction drive means for driving the drive means so as to correct the displacement amount using the correction signal.