JPS63167781U - - Google Patents
Info
- Publication number
- JPS63167781U JPS63167781U JP6171887U JP6171887U JPS63167781U JP S63167781 U JPS63167781 U JP S63167781U JP 6171887 U JP6171887 U JP 6171887U JP 6171887 U JP6171887 U JP 6171887U JP S63167781 U JPS63167781 U JP S63167781U
- Authority
- JP
- Japan
- Prior art keywords
- film
- pattern
- monitoring
- circuit
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6171887U JPS63167781U (ar) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6171887U JPS63167781U (ar) | 1987-04-22 | 1987-04-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63167781U true JPS63167781U (ar) | 1988-11-01 |
Family
ID=30895318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6171887U Pending JPS63167781U (ar) | 1987-04-22 | 1987-04-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63167781U (ar) |
-
1987
- 1987-04-22 JP JP6171887U patent/JPS63167781U/ja active Pending