JPS63167382U - - Google Patents

Info

Publication number
JPS63167382U
JPS63167382U JP5934287U JP5934287U JPS63167382U JP S63167382 U JPS63167382 U JP S63167382U JP 5934287 U JP5934287 U JP 5934287U JP 5934287 U JP5934287 U JP 5934287U JP S63167382 U JPS63167382 U JP S63167382U
Authority
JP
Japan
Prior art keywords
coil
movable mechanism
positioning table
linear motor
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5934287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5934287U priority Critical patent/JPS63167382U/ja
Publication of JPS63167382U publication Critical patent/JPS63167382U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP5934287U 1987-04-20 1987-04-20 Pending JPS63167382U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5934287U JPS63167382U (enrdf_load_stackoverflow) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5934287U JPS63167382U (enrdf_load_stackoverflow) 1987-04-20 1987-04-20

Publications (1)

Publication Number Publication Date
JPS63167382U true JPS63167382U (enrdf_load_stackoverflow) 1988-10-31

Family

ID=30890744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5934287U Pending JPS63167382U (enrdf_load_stackoverflow) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPS63167382U (enrdf_load_stackoverflow)

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