JPS6316703U - - Google Patents

Info

Publication number
JPS6316703U
JPS6316703U JP11052486U JP11052486U JPS6316703U JP S6316703 U JPS6316703 U JP S6316703U JP 11052486 U JP11052486 U JP 11052486U JP 11052486 U JP11052486 U JP 11052486U JP S6316703 U JPS6316703 U JP S6316703U
Authority
JP
Japan
Prior art keywords
plasma
matching device
wire
generation chamber
adjusting body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11052486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11052486U priority Critical patent/JPS6316703U/ja
Publication of JPS6316703U publication Critical patent/JPS6316703U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP11052486U 1986-07-17 1986-07-17 Pending JPS6316703U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11052486U JPS6316703U (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11052486U JPS6316703U (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Publications (1)

Publication Number Publication Date
JPS6316703U true JPS6316703U (enrdf_load_stackoverflow) 1988-02-03

Family

ID=30989604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11052486U Pending JPS6316703U (enrdf_load_stackoverflow) 1986-07-17 1986-07-17

Country Status (1)

Country Link
JP (1) JPS6316703U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60217244A (ja) * 1984-04-11 1985-10-30 Kanto Jidosha Kogyo Kk プラズマ前処理を伴う塗装法における塗膜の付着強度管理方法及び装置
JPS611101A (ja) * 1984-06-13 1986-01-07 Fujitsu Ltd マイクロ波処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60217244A (ja) * 1984-04-11 1985-10-30 Kanto Jidosha Kogyo Kk プラズマ前処理を伴う塗装法における塗膜の付着強度管理方法及び装置
JPS611101A (ja) * 1984-06-13 1986-01-07 Fujitsu Ltd マイクロ波処理装置

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