JPS63166702U - - Google Patents
Info
- Publication number
- JPS63166702U JPS63166702U JP6017387U JP6017387U JPS63166702U JP S63166702 U JPS63166702 U JP S63166702U JP 6017387 U JP6017387 U JP 6017387U JP 6017387 U JP6017387 U JP 6017387U JP S63166702 U JPS63166702 U JP S63166702U
- Authority
- JP
- Japan
- Prior art keywords
- accumulator
- thin film
- metal thin
- diaphragm
- resin member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 230000000379 polymerizing effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Diaphragms And Bellows (AREA)
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060173U JPH0640321Y2 (ja) | 1987-04-20 | 1987-04-20 | アキュムレータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060173U JPH0640321Y2 (ja) | 1987-04-20 | 1987-04-20 | アキュムレータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63166702U true JPS63166702U (ar) | 1988-10-31 |
| JPH0640321Y2 JPH0640321Y2 (ja) | 1994-10-19 |
Family
ID=30892349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987060173U Expired - Lifetime JPH0640321Y2 (ja) | 1987-04-20 | 1987-04-20 | アキュムレータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640321Y2 (ar) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0284059U (ar) * | 1988-12-16 | 1990-06-29 | ||
| JP2009293507A (ja) * | 2008-06-05 | 2009-12-17 | Alps Electric Co Ltd | 圧電ポンプ |
-
1987
- 1987-04-20 JP JP1987060173U patent/JPH0640321Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0284059U (ar) * | 1988-12-16 | 1990-06-29 | ||
| JP2009293507A (ja) * | 2008-06-05 | 2009-12-17 | Alps Electric Co Ltd | 圧電ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640321Y2 (ja) | 1994-10-19 |