JPS63165848U - - Google Patents
Info
- Publication number
- JPS63165848U JPS63165848U JP1987058501U JP5850187U JPS63165848U JP S63165848 U JPS63165848 U JP S63165848U JP 1987058501 U JP1987058501 U JP 1987058501U JP 5850187 U JP5850187 U JP 5850187U JP S63165848 U JPS63165848 U JP S63165848U
- Authority
- JP
- Japan
- Prior art keywords
- rail
- probe card
- actuator
- transport
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058501U JPH039332Y2 (enExample) | 1987-04-17 | 1987-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058501U JPH039332Y2 (enExample) | 1987-04-17 | 1987-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63165848U true JPS63165848U (enExample) | 1988-10-28 |
| JPH039332Y2 JPH039332Y2 (enExample) | 1991-03-08 |
Family
ID=30889134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987058501U Expired JPH039332Y2 (enExample) | 1987-04-17 | 1987-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH039332Y2 (enExample) |
-
1987
- 1987-04-17 JP JP1987058501U patent/JPH039332Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH039332Y2 (enExample) | 1991-03-08 |