JPS63165848U - - Google Patents

Info

Publication number
JPS63165848U
JPS63165848U JP5850187U JP5850187U JPS63165848U JP S63165848 U JPS63165848 U JP S63165848U JP 5850187 U JP5850187 U JP 5850187U JP 5850187 U JP5850187 U JP 5850187U JP S63165848 U JPS63165848 U JP S63165848U
Authority
JP
Japan
Prior art keywords
rail
probe card
actuator
transport
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5850187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH039332Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5850187U priority Critical patent/JPH039332Y2/ja
Publication of JPS63165848U publication Critical patent/JPS63165848U/ja
Application granted granted Critical
Publication of JPH039332Y2 publication Critical patent/JPH039332Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5850187U 1987-04-17 1987-04-17 Expired JPH039332Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5850187U JPH039332Y2 (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5850187U JPH039332Y2 (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Publications (2)

Publication Number Publication Date
JPS63165848U true JPS63165848U (enrdf_load_stackoverflow) 1988-10-28
JPH039332Y2 JPH039332Y2 (enrdf_load_stackoverflow) 1991-03-08

Family

ID=30889134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5850187U Expired JPH039332Y2 (enrdf_load_stackoverflow) 1987-04-17 1987-04-17

Country Status (1)

Country Link
JP (1) JPH039332Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH039332Y2 (enrdf_load_stackoverflow) 1991-03-08

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