JPS63165844U - - Google Patents

Info

Publication number
JPS63165844U
JPS63165844U JP5862387U JP5862387U JPS63165844U JP S63165844 U JPS63165844 U JP S63165844U JP 5862387 U JP5862387 U JP 5862387U JP 5862387 U JP5862387 U JP 5862387U JP S63165844 U JPS63165844 U JP S63165844U
Authority
JP
Japan
Prior art keywords
electrode
sample
plasma processing
placing
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5862387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5862387U priority Critical patent/JPS63165844U/ja
Publication of JPS63165844U publication Critical patent/JPS63165844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5862387U 1987-04-20 1987-04-20 Pending JPS63165844U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5862387U JPS63165844U (US20090163788A1-20090625-C00002.png) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5862387U JPS63165844U (US20090163788A1-20090625-C00002.png) 1987-04-20 1987-04-20

Publications (1)

Publication Number Publication Date
JPS63165844U true JPS63165844U (US20090163788A1-20090625-C00002.png) 1988-10-28

Family

ID=30889365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5862387U Pending JPS63165844U (US20090163788A1-20090625-C00002.png) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPS63165844U (US20090163788A1-20090625-C00002.png)

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