JPS63165750U - - Google Patents

Info

Publication number
JPS63165750U
JPS63165750U JP5877587U JP5877587U JPS63165750U JP S63165750 U JPS63165750 U JP S63165750U JP 5877587 U JP5877587 U JP 5877587U JP 5877587 U JP5877587 U JP 5877587U JP S63165750 U JPS63165750 U JP S63165750U
Authority
JP
Japan
Prior art keywords
extraction electrode
electrode
ion beam
drawer
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5877587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987058775U priority Critical patent/JPH0353402Y2/ja
Publication of JPS63165750U publication Critical patent/JPS63165750U/ja
Application granted granted Critical
Publication of JPH0353402Y2 publication Critical patent/JPH0353402Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1987058775U 1987-04-20 1987-04-20 Expired JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987058775U JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987058775U JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-20 1987-04-20

Publications (2)

Publication Number Publication Date
JPS63165750U true JPS63165750U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-28
JPH0353402Y2 JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-21

Family

ID=30889648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987058775U Expired JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007523444A (ja) * 2003-10-17 2007-08-16 エフ・イ−・アイ・カンパニー 帯電粒子抽出デバイスおよびその設計方法
JP2016081753A (ja) * 2014-10-17 2016-05-16 住友重機械イオンテクノロジー株式会社 ビーム引出スリット構造及びイオン源
JP2024532936A (ja) * 2021-09-13 2024-09-10 アプライド マテリアルズ インコーポレイテッド 可変厚さイオン源抽出プレート

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6076838B2 (ja) 2013-05-31 2017-02-08 住友重機械イオンテクノロジー株式会社 絶縁構造及び絶縁方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PROCEEDINGS OF THE INTERNATIONAL ION ENGINEERING CONGRESS=1983 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007523444A (ja) * 2003-10-17 2007-08-16 エフ・イ−・アイ・カンパニー 帯電粒子抽出デバイスおよびその設計方法
JP2016081753A (ja) * 2014-10-17 2016-05-16 住友重機械イオンテクノロジー株式会社 ビーム引出スリット構造及びイオン源
JP2024532936A (ja) * 2021-09-13 2024-09-10 アプライド マテリアルズ インコーポレイテッド 可変厚さイオン源抽出プレート

Also Published As

Publication number Publication date
JPH0353402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-21

Similar Documents

Publication Publication Date Title
JPS63165750U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5974659U (ja) イオン注入装置のイオン発生装置
JPS6296255U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0449448U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0461733U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0231055U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0241400U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0337742U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0374453U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6348200U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0298451U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0254156U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS63150455U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6284149U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0454138U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0333946U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01160648U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01158640U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6356549U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH03110595U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01117050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0229149U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62172452U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6395150U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0297744U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)