JPS63165535U - - Google Patents
Info
- Publication number
- JPS63165535U JPS63165535U JP5803587U JP5803587U JPS63165535U JP S63165535 U JPS63165535 U JP S63165535U JP 5803587 U JP5803587 U JP 5803587U JP 5803587 U JP5803587 U JP 5803587U JP S63165535 U JPS63165535 U JP S63165535U
- Authority
- JP
- Japan
- Prior art keywords
- pin
- outer cylinder
- thermocouple
- hole
- support jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005553 drilling Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058035U JPH0530107Y2 (enExample) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058035U JPH0530107Y2 (enExample) | 1987-04-15 | 1987-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63165535U true JPS63165535U (enExample) | 1988-10-27 |
| JPH0530107Y2 JPH0530107Y2 (enExample) | 1993-08-02 |
Family
ID=30888271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987058035U Expired - Lifetime JPH0530107Y2 (enExample) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530107Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5230182U (enExample) * | 1975-08-23 | 1977-03-02 | ||
| JPS58156236U (ja) * | 1982-04-14 | 1983-10-19 | 株式会社日立製作所 | 温度センサ− |
-
1987
- 1987-04-15 JP JP1987058035U patent/JPH0530107Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5230182U (enExample) * | 1975-08-23 | 1977-03-02 | ||
| JPS58156236U (ja) * | 1982-04-14 | 1983-10-19 | 株式会社日立製作所 | 温度センサ− |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530107Y2 (enExample) | 1993-08-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63165535U (enExample) | ||
| ATE15980T1 (de) | Vorrichtung zum befestigen einer expansionsoder lochbirne an einer haltestange. | |
| JPS62100837U (enExample) | ||
| JPS5850211U (ja) | 伸縮自在杆 | |
| JPS6335542U (enExample) | ||
| JPH032254U (enExample) | ||
| JPS6051309U (ja) | 伸縮自在なパイプ | |
| JPS6185373U (enExample) | ||
| JPS6392303U (enExample) | ||
| JPH0189539U (enExample) | ||
| JPH0356566U (enExample) | ||
| JPH01124506U (enExample) | ||
| JPS62163157U (enExample) | ||
| JPS6191199U (enExample) | ||
| JPH0293776U (enExample) | ||
| JPS63188550U (enExample) | ||
| JPS63160802U (enExample) | ||
| JPS6027430U (ja) | ウエハ保持具 | |
| JPH0212149U (enExample) | ||
| JPS62156483U (enExample) | ||
| JPS63135158U (enExample) | ||
| JPS61137268U (enExample) | ||
| JPH0191254U (enExample) | ||
| JPH0592318U (ja) | 木製壁面用把手取付装置 | |
| JPS6419195U (enExample) |