JPS63164901U - - Google Patents
Info
- Publication number
- JPS63164901U JPS63164901U JP5608087U JP5608087U JPS63164901U JP S63164901 U JPS63164901 U JP S63164901U JP 5608087 U JP5608087 U JP 5608087U JP 5608087 U JP5608087 U JP 5608087U JP S63164901 U JPS63164901 U JP S63164901U
- Authority
- JP
- Japan
- Prior art keywords
- condensable components
- cold trap
- cold
- components
- condensable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5608087U JPS63164901U (zh) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5608087U JPS63164901U (zh) | 1987-04-15 | 1987-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164901U true JPS63164901U (zh) | 1988-10-27 |
Family
ID=30884577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5608087U Pending JPS63164901U (zh) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164901U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011005483A (ja) * | 2009-05-22 | 2011-01-13 | Kitagawa Elaborate Mach Co Ltd | 不純物回収装置 |
| JP2014132212A (ja) * | 2006-07-04 | 2014-07-17 | Toshiba Mitsubishi-Electric Industrial System Corp | 特定ガスの濃縮・希釈装置および特定ガスの濃縮・希釈方法 |
-
1987
- 1987-04-15 JP JP5608087U patent/JPS63164901U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014132212A (ja) * | 2006-07-04 | 2014-07-17 | Toshiba Mitsubishi-Electric Industrial System Corp | 特定ガスの濃縮・希釈装置および特定ガスの濃縮・希釈方法 |
| JP2011005483A (ja) * | 2009-05-22 | 2011-01-13 | Kitagawa Elaborate Mach Co Ltd | 不純物回収装置 |