JPS6316473U - - Google Patents
Info
- Publication number
- JPS6316473U JPS6316473U JP10873686U JP10873686U JPS6316473U JP S6316473 U JPS6316473 U JP S6316473U JP 10873686 U JP10873686 U JP 10873686U JP 10873686 U JP10873686 U JP 10873686U JP S6316473 U JPS6316473 U JP S6316473U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- discharge vessel
- piping
- vacuum pump
- treatment device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10873686U JPS6316473U (ru) | 1986-07-17 | 1986-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10873686U JPS6316473U (ru) | 1986-07-17 | 1986-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6316473U true JPS6316473U (ru) | 1988-02-03 |
Family
ID=30986207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10873686U Pending JPS6316473U (ru) | 1986-07-17 | 1986-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6316473U (ru) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01100984A (ja) * | 1987-10-14 | 1989-04-19 | Nissin Electric Co Ltd | エキシマレーザ装置のガス充填方法 |
| JPH021194A (ja) * | 1988-03-31 | 1990-01-05 | Komatsu Ltd | エキシマレーザ装置 |
-
1986
- 1986-07-17 JP JP10873686U patent/JPS6316473U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01100984A (ja) * | 1987-10-14 | 1989-04-19 | Nissin Electric Co Ltd | エキシマレーザ装置のガス充填方法 |
| JPH021194A (ja) * | 1988-03-31 | 1990-01-05 | Komatsu Ltd | エキシマレーザ装置 |