JPS6316438U - - Google Patents
Info
- Publication number
- JPS6316438U JPS6316438U JP10936986U JP10936986U JPS6316438U JP S6316438 U JPS6316438 U JP S6316438U JP 10936986 U JP10936986 U JP 10936986U JP 10936986 U JP10936986 U JP 10936986U JP S6316438 U JPS6316438 U JP S6316438U
- Authority
- JP
- Japan
- Prior art keywords
- tio
- infrared absorption
- thin
- wafer exposure
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10936986U JPH0445235Y2 (ja�@�@) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10936986U JPH0445235Y2 (ja�@�@) | 1986-07-18 | 1986-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6316438U true JPS6316438U (ja�@�@) | 1988-02-03 |
| JPH0445235Y2 JPH0445235Y2 (ja�@�@) | 1992-10-23 |
Family
ID=30987403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10936986U Expired JPH0445235Y2 (ja�@�@) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445235Y2 (ja�@�@) |
-
1986
- 1986-07-18 JP JP10936986U patent/JPH0445235Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0445235Y2 (ja�@�@) | 1992-10-23 |