JPS6316438U - - Google Patents
Info
- Publication number
- JPS6316438U JPS6316438U JP1986109369U JP10936986U JPS6316438U JP S6316438 U JPS6316438 U JP S6316438U JP 1986109369 U JP1986109369 U JP 1986109369U JP 10936986 U JP10936986 U JP 10936986U JP S6316438 U JPS6316438 U JP S6316438U
- Authority
- JP
- Japan
- Prior art keywords
- tio
- infrared absorption
- thin
- wafer exposure
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986109369U JPH0445235Y2 (enExample) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986109369U JPH0445235Y2 (enExample) | 1986-07-18 | 1986-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6316438U true JPS6316438U (enExample) | 1988-02-03 |
| JPH0445235Y2 JPH0445235Y2 (enExample) | 1992-10-23 |
Family
ID=30987403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986109369U Expired JPH0445235Y2 (enExample) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445235Y2 (enExample) |
-
1986
- 1986-07-18 JP JP1986109369U patent/JPH0445235Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0445235Y2 (enExample) | 1992-10-23 |