JPS6316438U - - Google Patents

Info

Publication number

JPS6316438U

JPS6316438U JP10936986U JP10936986U JPS6316438U JP S6316438 U JPS6316438 U JP S6316438U JP 10936986 U JP10936986 U JP 10936986U JP 10936986 U JP10936986 U JP 10936986U JP S6316438 U JPS6316438 U JP S6316438U

Authority

JP

Japan

Prior art keywords

tio

infrared absorption

thin

wafer exposure

thin film

Prior art date

1986-07-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 239000010409 thin film Substances 0.000 claims description 5
• NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
• 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
• 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
• 239000011521 glass Substances 0.000 claims description 2
• 238000010521 absorption reaction Methods 0.000 claims 2
• 229910004298 SiO 2 Inorganic materials 0.000 claims 1
• 239000002131 composite material Substances 0.000 claims 1
• 239000010408 film Substances 0.000 claims 1
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
• 229910052753 mercury Inorganic materials 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 230000003287 optical effect Effects 0.000 description 2
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1