JPS63164219U - - Google Patents

Info

Publication number
JPS63164219U
JPS63164219U JP17786886U JP17786886U JPS63164219U JP S63164219 U JPS63164219 U JP S63164219U JP 17786886 U JP17786886 U JP 17786886U JP 17786886 U JP17786886 U JP 17786886U JP S63164219 U JPS63164219 U JP S63164219U
Authority
JP
Japan
Prior art keywords
power source
high frequency
frequency power
upper electrodes
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17786886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0513006Y2 (US07847105-20101207-C00016.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986177868U priority Critical patent/JPH0513006Y2/ja
Publication of JPS63164219U publication Critical patent/JPS63164219U/ja
Application granted granted Critical
Publication of JPH0513006Y2 publication Critical patent/JPH0513006Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1986177868U 1986-11-19 1986-11-19 Expired - Lifetime JPH0513006Y2 (US07847105-20101207-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986177868U JPH0513006Y2 (US07847105-20101207-C00016.png) 1986-11-19 1986-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986177868U JPH0513006Y2 (US07847105-20101207-C00016.png) 1986-11-19 1986-11-19

Publications (2)

Publication Number Publication Date
JPS63164219U true JPS63164219U (US07847105-20101207-C00016.png) 1988-10-26
JPH0513006Y2 JPH0513006Y2 (US07847105-20101207-C00016.png) 1993-04-06

Family

ID=31119471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986177868U Expired - Lifetime JPH0513006Y2 (US07847105-20101207-C00016.png) 1986-11-19 1986-11-19

Country Status (1)

Country Link
JP (1) JPH0513006Y2 (US07847105-20101207-C00016.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681678A (en) * 1979-12-05 1981-07-03 Toshiba Corp Method and apparatus for plasma etching
JPS6045024A (ja) * 1983-08-23 1985-03-11 Toshiba Corp ドライエツチング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681678A (en) * 1979-12-05 1981-07-03 Toshiba Corp Method and apparatus for plasma etching
JPS6045024A (ja) * 1983-08-23 1985-03-11 Toshiba Corp ドライエツチング装置

Also Published As

Publication number Publication date
JPH0513006Y2 (US07847105-20101207-C00016.png) 1993-04-06

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