JPS63164215U - - Google Patents

Info

Publication number
JPS63164215U
JPS63164215U JP5761287U JP5761287U JPS63164215U JP S63164215 U JPS63164215 U JP S63164215U JP 5761287 U JP5761287 U JP 5761287U JP 5761287 U JP5761287 U JP 5761287U JP S63164215 U JPS63164215 U JP S63164215U
Authority
JP
Japan
Prior art keywords
rotating shaft
chuck
wafer
container
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5761287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5761287U priority Critical patent/JPS63164215U/ja
Publication of JPS63164215U publication Critical patent/JPS63164215U/ja
Pending legal-status Critical Current

Links

JP5761287U 1987-04-16 1987-04-16 Pending JPS63164215U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5761287U JPS63164215U (US20090163788A1-20090625-C00002.png) 1987-04-16 1987-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5761287U JPS63164215U (US20090163788A1-20090625-C00002.png) 1987-04-16 1987-04-16

Publications (1)

Publication Number Publication Date
JPS63164215U true JPS63164215U (US20090163788A1-20090625-C00002.png) 1988-10-26

Family

ID=30887481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5761287U Pending JPS63164215U (US20090163788A1-20090625-C00002.png) 1987-04-16 1987-04-16

Country Status (1)

Country Link
JP (1) JPS63164215U (US20090163788A1-20090625-C00002.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53773A (en) * 1976-06-10 1978-01-06 Fruehwirth Rudolf Cigarette dispenser

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53773A (en) * 1976-06-10 1978-01-06 Fruehwirth Rudolf Cigarette dispenser

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