JPS63163508U - - Google Patents
Info
- Publication number
- JPS63163508U JPS63163508U JP5584987U JP5584987U JPS63163508U JP S63163508 U JPS63163508 U JP S63163508U JP 5584987 U JP5584987 U JP 5584987U JP 5584987 U JP5584987 U JP 5584987U JP S63163508 U JPS63163508 U JP S63163508U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- diaphragm
- back pressure
- passage
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5584987U JPS63163508U (fi) | 1987-04-13 | 1987-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5584987U JPS63163508U (fi) | 1987-04-13 | 1987-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63163508U true JPS63163508U (fi) | 1988-10-25 |
Family
ID=30884134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5584987U Pending JPS63163508U (fi) | 1987-04-13 | 1987-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63163508U (fi) |
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1987
- 1987-04-13 JP JP5584987U patent/JPS63163508U/ja active Pending