JPS63163271U - - Google Patents

Info

Publication number
JPS63163271U
JPS63163271U JP5356187U JP5356187U JPS63163271U JP S63163271 U JPS63163271 U JP S63163271U JP 5356187 U JP5356187 U JP 5356187U JP 5356187 U JP5356187 U JP 5356187U JP S63163271 U JPS63163271 U JP S63163271U
Authority
JP
Japan
Prior art keywords
fluorine
tank
inert liquid
based inert
heating section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5356187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5356187U priority Critical patent/JPS63163271U/ja
Publication of JPS63163271U publication Critical patent/JPS63163271U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP5356187U 1987-04-10 1987-04-10 Pending JPS63163271U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5356187U JPS63163271U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5356187U JPS63163271U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63163271U true JPS63163271U (enrdf_load_stackoverflow) 1988-10-25

Family

ID=30879742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5356187U Pending JPS63163271U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63163271U (enrdf_load_stackoverflow)

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