JPS63162981U - - Google Patents

Info

Publication number
JPS63162981U
JPS63162981U JP5456787U JP5456787U JPS63162981U JP S63162981 U JPS63162981 U JP S63162981U JP 5456787 U JP5456787 U JP 5456787U JP 5456787 U JP5456787 U JP 5456787U JP S63162981 U JPS63162981 U JP S63162981U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
piezoelectric
check valve
casing
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5456787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0629508Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987054567U priority Critical patent/JPH0629508Y2/ja
Publication of JPS63162981U publication Critical patent/JPS63162981U/ja
Application granted granted Critical
Publication of JPH0629508Y2 publication Critical patent/JPH0629508Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1987054567U 1987-04-10 1987-04-10 圧電振動子ポンプ Expired - Lifetime JPH0629508Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987054567U JPH0629508Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987054567U JPH0629508Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Publications (2)

Publication Number Publication Date
JPS63162981U true JPS63162981U (US06566495-20030520-M00011.png) 1988-10-25
JPH0629508Y2 JPH0629508Y2 (ja) 1994-08-10

Family

ID=30881679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987054567U Expired - Lifetime JPH0629508Y2 (ja) 1987-04-10 1987-04-10 圧電振動子ポンプ

Country Status (1)

Country Link
JP (1) JPH0629508Y2 (US06566495-20030520-M00011.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588087U (US06566495-20030520-M00011.png) * 1978-12-13 1980-06-18
JPS6098181A (ja) * 1983-11-04 1985-06-01 Asahi Okuma Ind Co Ltd ダイヤフラムポンプ
JPS60195986U (ja) * 1984-06-08 1985-12-27 株式会社三鈴エリー 圧電体振動子ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588087U (US06566495-20030520-M00011.png) * 1978-12-13 1980-06-18
JPS6098181A (ja) * 1983-11-04 1985-06-01 Asahi Okuma Ind Co Ltd ダイヤフラムポンプ
JPS60195986U (ja) * 1984-06-08 1985-12-27 株式会社三鈴エリー 圧電体振動子ポンプ

Also Published As

Publication number Publication date
JPH0629508Y2 (ja) 1994-08-10

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