JPS63162860U - - Google Patents

Info

Publication number
JPS63162860U
JPS63162860U JP5488987U JP5488987U JPS63162860U JP S63162860 U JPS63162860 U JP S63162860U JP 5488987 U JP5488987 U JP 5488987U JP 5488987 U JP5488987 U JP 5488987U JP S63162860 U JPS63162860 U JP S63162860U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition material
electron beam
hole
evaporation material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5488987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5488987U priority Critical patent/JPS63162860U/ja
Publication of JPS63162860U publication Critical patent/JPS63162860U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5488987U 1987-04-10 1987-04-10 Pending JPS63162860U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5488987U JPS63162860U (enrdf_load_html_response) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5488987U JPS63162860U (enrdf_load_html_response) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162860U true JPS63162860U (enrdf_load_html_response) 1988-10-24

Family

ID=30882292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5488987U Pending JPS63162860U (enrdf_load_html_response) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162860U (enrdf_load_html_response)

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